Standard

ISO 21360-4:2018

Jul 2018 Current

Existing or new amendments and versions must be purchased separately.

Language English French

Services Online + Pdf CHF 67,00 Online CHF 57,00

There are no extended editions available for this standard

There are no available corrigendum or amendments for this standard. Any future corrigendum and amendments will be added automatically for subscribers.

Abstract

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those — with mechanical or magnetic bearings; — with or without an additional drag stage(s) or other pumping stages on the shaft; — with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance. The following completes the performance characteristics: — information about throughputs and backing pressure of the turbomolecular vacuum pump; — the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).

Products specifications

Standard from ISO
Published: July 31 2018
Edition: 1
Document type: IS
Pages
ISBN:

Publisher: ISO
Distributor: ISO
ICS: 23.160
International TC: ISO/TC 112

Extended editions Extended editions (0)

Version history Related Corrigenda and Amendments (0)

Abstract

Products specifications